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                <term xml:lang="en">plasma surface interactions Chatain et al (2020) PSST</term>
                <term xml:lang="en">submitted version 2</term>
                <term xml:lang="en">plasma surface interactions</term>
                <term xml:lang="en">neutral and ions mass spectrometry</term>
                <term xml:lang="en">IR absorption</term>
                <term xml:lang="en">NH3</term>
                <term xml:lang="en">N2 H2 mixture</term>
                <term xml:lang="en">CCP discharge</term>
                <term xml:lang="en">cold plasma</term>
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              <p>The mixing of N&lt;sub&gt;2&lt;/sub&gt; with H&lt;sub&gt;2&lt;/sub&gt; leads to very different plasmas from pure N&lt;sub&gt;2&lt;/sub&gt; and H&lt;sub&gt;2&lt;/sub&gt; plasma discharges. Numerous issues are therefore raised involving the processes leading to ammonia (NH&lt;sub&gt;3&lt;/sub&gt;) formation. The aim of this work is to better characterize capacitively-coupled radiofrequency plasma discharges in N&lt;sub&gt;2&lt;/sub&gt; with few percents of H&lt;sub&gt;2&lt;/sub&gt; (up to 5%), at low pressure (0.3 to 1 mbar) and low coupled power (3 to 13 W). Both experimental measurements and numerical simulations are performed. For clarity, we separated the results in two complementary parts. The actual one (first part), presents the details on the experimental measurements, while the second focuses on the simulation, a hybrid model combining a 2D fluid module and a 0D kinetic module. Electron density is measured by a resonant cavity method. It varies from 0.4 to 5.10&lt;sup&gt;9&lt;/sup&gt; cm&lt;sup&gt;-3&lt;/sup&gt;, corresponding to ionization degrees from 2.10&lt;sup&gt;-8&lt;/sup&gt; to 4.10&lt;sup&gt;-7&lt;/sup&gt;. Ammonia density is quantified by combining IR absorption and mass spectrometry. It increases linearly with the amount of H&lt;sub&gt;2&lt;/sub&gt; (up to 3.10&lt;sup&gt;13&lt;/sup&gt; cm&lt;sup&gt;-3&lt;/sup&gt; at 5% H&lt;sub&gt;2&lt;/sub&gt;). On the contrary, it is constant with pressure, which suggests the dominance of surface processes on the formation of ammonia. Positive ions are measured by mass spectrometry. Nitrogen-bearing ions are hydrogenated by the injection of H&lt;sub&gt;2&lt;/sub&gt;, N&lt;sub&gt;2&lt;/sub&gt;H&lt;sup&gt;+&lt;/sup&gt; being the major ion as soon as the amount of H&lt;sub&gt;2&lt;/sub&gt; is &gt; 1%. The increase of pressure leads to an increase of secondary ions formed by ion/radical – neutral collisions (ex: N&lt;sub&gt;2&lt;/sub&gt;H&lt;sup&gt;+&lt;/sup&gt;, NH&lt;sub&gt;4&lt;/sub&gt;&lt;sup&gt;+&lt;/sup&gt;, H&lt;sub&gt;3&lt;/sub&gt;&lt;sup&gt;+&lt;/sup&gt;), while an increase of the coupled power favors ions formed by direct ionization (ex: N&lt;sub&gt;2&lt;/sub&gt;&lt;sup&gt;+&lt;/sup&gt;, NH&lt;sub&gt;3&lt;/sub&gt;&lt;sup&gt;+&lt;/sup&gt;, H&lt;sub&gt;2&lt;/sub&gt;&lt;sup&gt;+&lt;/sup&gt;).</p>
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              <p>Le mélange de N&lt;sub&gt;2&lt;/sub&gt; avec H&lt;sub&gt;2&lt;/sub&gt; conduit à des plasmas très différents des décharges dans N&lt;sub&gt;2&lt;/sub&gt; seul ou H&lt;sub&gt;2&lt;/sub&gt; seul. Ainsi, de nombreuses problématiques en découlent, dont notamment les processus de formation de l’ammoniac (NH&lt;sub&gt;3&lt;/sub&gt;).L’objectif de ce travail est de mieux caractériser les décharges plasma radiofréquences couplées capacitivement dans un mélange gazeux de N&lt;sub&gt;2&lt;/sub&gt; avec quelques pourcents de H&lt;sub&gt;2&lt;/sub&gt; (jusqu’à 5%), à basse pression (0.3 à 1 mbar) et à faible puissance couplée (3 à 13 W). Nous avons combiné des mesures expérimentales et des simulations numériques. Par soucis de clarté, nous avons séparé les résultats en deux parties complémentaires. Cet article (le premier des deux) présente les détails des mesures expérimentales, et le second est centré sur la description de la simulation numérique, un modèle hybride combinant un module fluide 2D et un module cinétique 0D.La densité électronique est mesurée par une méthode de cavité résonante. Elle varie entre 0,4 et 5.10&lt;sup&gt;9&lt;/sup&gt; cm&lt;sup&gt;-3&lt;/sup&gt;, correspondant à des degrés d’ionisation de 2.10&lt;sup&gt;-8&lt;/sup&gt; à 4.10&lt;sup&gt;-7&lt;/sup&gt;. La densité d’ammoniac est quantifiée par la combinaison des résultats de spectrométrie d’absorption infrarouge et de spectrométrie de masse. Elle croît linéairement avec la quantité de H&lt;sub&gt;2&lt;/sub&gt; (jusqu’à 3.10&lt;sup&gt;13&lt;/sup&gt; cm&lt;sup&gt;-3&lt;/sup&gt; à 5% H&lt;sub&gt;2&lt;/sub&gt;). A l’inverse, elle est constante avec la pression, ce qui suggère la prédominance des processus de surface dans la formation d’ammoniac. Les ions positifs sont mesurés par spectrométrie de masse. Les ions contenant de l’azote sont hydrogénés avec l’ajout de H&lt;sub&gt;2&lt;/sub&gt;, N&lt;sub&gt;2&lt;/sub&gt;H&lt;sup&gt;+&lt;/sup&gt; devenant l’ion majoritaire dès que la quantité de H&lt;sub&gt;2&lt;/sub&gt; est &gt; 1%. Une augmentation de la pression conduit à une augmentation des ions secondaires formés par les collisions entre les ions/radicaux et les neutres  (ex: N&lt;sub&gt;2&lt;/sub&gt;H&lt;sup&gt;+&lt;/sup&gt;, NH&lt;sub&gt;4&lt;/sub&gt;&lt;sup&gt;+&lt;/sup&gt;, H&lt;sub&gt;3&lt;/sub&gt;&lt;sup&gt;+&lt;/sup&gt;). A l’inverse, une augmentation de la puissance couplée favorise les ions formés par ionisation directe (ex: N&lt;sub&gt;2&lt;/sub&gt;&lt;sup&gt;+&lt;/sup&gt;, NH&lt;sub&gt;3&lt;/sub&gt;&lt;sup&gt;+&lt;/sup&gt;, H&lt;sub&gt;2&lt;/sub&gt;&lt;sup&gt;+&lt;/sup&gt;).</p>
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