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Journal Articles Review of Scientific Instruments Year : 2002

Submicron x-ray diffraction and its applications to problems in materials and environmental science

N. Tamura
  • Function : Author
R. S. Celestre
  • Function : Author
A. A. Macdowell
  • Function : Author
H. A. Padmore
  • Function : Author
R. Spolenak
  • Function : Author
B. C. Valek
  • Function : Author
N. Meier Chang
  • Function : Author
J. R. Patel
  • Function : Author

Abstract

The availability of high brilliance third generation synchrotron sources together with progress in achromatic focusing optics allows us to add submicron spatial resolution to the conventional century-old x-ray diffraction technique. The new capabilities include the possibility to map in situ, grain orientations, crystalline phase distribution, and full strain/stress tensors at a very local level, by combining white and monochromatic x-ray microbeam diffraction. This is particularly relevant for high technology industry where the understanding of material properties at a microstructural level becomes increasingly important. After describing the latest advances in the submicron x-ray diffraction techniques at the Advanced Light Source, we will give some examples of its application in material science for the measurement of strain/stress in metallic thin films and interconnects. Its use in the field of environmental science will also be discussed.

Dates and versions

insu-03607077 , version 1 (12-03-2022)

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Cite

N. Tamura, R. S. Celestre, A. A. Macdowell, H. A. Padmore, R. Spolenak, et al.. Submicron x-ray diffraction and its applications to problems in materials and environmental science. Review of Scientific Instruments, 2002, 73, pp.1369-1372. ⟨10.1063/1.1436539⟩. ⟨insu-03607077⟩

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